WAFERTEC spincoater with hotplate SP 05
| Spincoater | |
| Max.Speed | 6000 RPM, programmable, 1-RPM-increment |
| Ramp | programable |
| Auto dispensing | programmable, interpolation |
| Moving arm | programmable, interpolation |
| Pump type | WAFERTEC dispense system |
| Max. viscosity | 20000 cp |
| EBR | option |
| Back side rinse | option |
| Handling arm | option |
Hotplate |
|
| Temperature | max. 250 ° C, 0,1 ° increments |
| Time | 60 sec, 1-sec-increments |
| Holding | vacuum |
| Auto lift | with pin |
© 2008 WAFERTEC PRIBYL GMBH