WAFERTEC Spincoater
| Technical specification: |
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| Max.Speed | 6000 RPM, 1-step-increments |
| Ramp | programmable, 1-step-increments |
| Brake | programmable, 1-step-increments |
| Substrate holding | vacuum |
| Motor | 600 W, Brushless |
| Power | 230 V, 5 A., 100 V option |
| Substrate size | 5 “ square or 6 “ wafer |
| Moving arm | controlled with interpolation |
| Spin speed | controlled with interpolation |
| Dispense speed | controlled with interpolation |
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© 2008 WAFERTEC PRIBYL GMBH